MEC 575 - Introduction to Micro Electro-Mechanical Systems (MEMS)

An introduction to the fundamental knowledge and experience in the design and manufacture of microsystems. Emphasis will be placed on the methodologies for design, fabrication, and packaging of microsystems. An overview on fabrication and manufacturing technologies for producing microsystems will also be covered. Interdisciplinary nature of MEMS will be emphasized via various engineering principles ranging from mechanical and electrical to materials and chemical engineering. Introduction of the working principles of micro actuators, sensors, and transducers.

3 credits

Prerequisite(s): Permission of instructor

Grading Letter graded (A, A-, B+, etc.)

Offered Spring